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Conferences > CLEO > 2010 > JTuD > JTuD18

Towards fast femtosecond laser micromachining of glass, effect of deposited energy.

Sheeba Rajesh and Yves Bellouard.

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Abstract

We report on the effect of deposited energy for micro-machining of fused silica using femtosecond laser irradiation followed by chemical etching.

© 2010 Optical Society of America

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