The 200W power high-stability KrF excimer laser

H. Hoshino; Y. Kodama; K. Takahashi; Y. Sugimoto; T. Abe; K. Sajiki; T. Nire

The 4th Pacific Rim Conference on Lasers and Electro-Optics
Technical Digest Series (Optica Publishing Group, 2001),
paper P1_1

The 200W power high-stability KrF excimer laser

H. Hoshino, Y. Kodama, K. Takahashi, Y. Sugimoto, T. Abe, K. Sajiki, and T. Nire

Conference on Lasers and Electro-Optics/Pacific Rim 2001

Chiba Japan
15–19 July 2001
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Poster Session 1 [Room E] (P1)

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H. Hoshino, Y. Kodama, K. Takahashi, Y. Sugimoto, T. Abe, K. Sajiki, and T. Nire, "The 200W power high-stability KrF excimer laser," in The 4th Pacific Rim Conference on Lasers and Electro-Optics, Technical Digest Series (Optica Publishing Group, 2001), paper P1_1.

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Abstract

We have developed a 200 W (1 J @ 200 Hz) KrF excimer laser which achieved energy stability under 6 % (peak to peak for 1000 shots) for 100 hours over.

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