Simultaneous fabrication of thousands of holes using high power KrF excimer laser

Noriyuki Sekizawa; Yoshiyuki Niwatsukino; Kazuaki Sajiki; Takashi Nire

The 4th Pacific Rim Conference on Lasers and Electro-Optics
Technical Digest Series (Optica Publishing Group, 2001),
paper TuB3_4

Simultaneous fabrication of thousands of holes using high power KrF excimer laser

Noriyuki Sekizawa, Yoshiyuki Niwatsukino, Kazuaki Sajiki, and Takashi Nire

Conference on Lasers and Electro-Optics/Pacific Rim 2001

Chiba Japan
15–19 July 2001
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Micro and Macro Engineering [Room B] (TuB3)

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N. Sekizawa, Y. Niwatsukino, K. Sajiki, and T. Nire, "Simultaneous fabrication of thousands of holes using high power KrF excimer laser," in The 4th Pacific Rim Conference on Lasers and Electro-Optics, Technical Digest Series (Optica Publishing Group, 2001), paper TuB3_4.

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Abstract

We have developed advanced via hole drilling system using high power KrF excimer laser and micro lens array, and fabricated 2000 holes (diameter:50 μ m) in 40mm square area of resin layer at once.

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