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Conferences > CLEOPR > 2001 > ThC1 > ThC1_5
  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper ThC1_5

Highly Uniform and Reproducible 850 nm Vertical-Cavity Surface-Emitting Lasers grown by MOCVD

H. J. Jang, Y. H. Song, B. J. Jeong, K. H. Lee, J. K. Son, Y. H. Lee, D. G. Choi, S. S. Yang, J. W. Yang, K. Y. Lim, and G. M. Yang

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Abstract

850 nm vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic chemical vapor deposition (MOCVD). High uniformity of Fabry-Perot cavity wavelength for VCSEL materials of ±0.15 % across a 3-in diameter wafer was achieved. Also, ±0.1 % Al composition uniformity of Al0.98Ga0.02As was obtained.

© 2001 IEEE

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