Abstract

The classical diffraction limit in optical microscopy is broken with use of nonlinear response of optical process as well as chemical process. We have applied such nonlinear effects to the fabrication of three-dimensional subwavelength structures in photopolymerzable resin.[1, 2]. A femtosecond laser is used to make two-photon photo-polymerization in a local position in liquid resin with a high NA objective lens; the structure is fabricated as a beam moves in the resin in 3D under computer control. After polymerization, unsolidified resin is removed by ethanol. A special technique was developed to shorten the time of fabrication[3].

© 2001 IEEE