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Conferences > CLEOPR > 2001 > TuG1 > TuG1_5
  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper TuG1_5

A New Measurement System with a Virtual Gray Level Pattern

Yeh-fen Fu and Lih-horng Shyu

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Abstract

In this paper, an equivalent gray level pattern with a small period has been proposed which is based on a concept of geometrical variety and associated with the manufacturing process of a semiconductor optical mask. A displacement measurement of high precision is achieved by a phase-detecting technology. The experiment result shows the concept is feasible.

© 2001 IEEE

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