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Conferences > CLEOPR > 2001 > TuH2 > TuH2_5
  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper TuH2_5

In-situ lateral fabrication of Zinc and Aluminum nanodots by near field optical chemical vapor deposition

Y. Yamamoto, T. Kawazoe, G. H. Lee, T. Shimizu, M. Kourogi, and M. Ohtsu

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Abstract

Nanometric Zn and Al dots were deposited on a sapphire substrate with the space of 100nm. Minimum diameter of fabricated Zn and Al dots were 37nm and 25nm, respectively.

© 2001 IEEE

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