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  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper TuH4_2

The effect of Mg diffusion on the contact resistance of low doped p-GaN

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Abstract

Magnesium diffusion was applied to low doped p-GaN (3 × 1016 cm-3) resulting in a reduction of resistance of the Ni/Au contact to the p-GaN by ~1.5 orders of magnitude.

© 2001 IEEE

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