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Conferences > CLEOPR > 2001 > WA1 > WA1_2
  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper WA1_2

Prototyped XY stages driving EB mastering for a high density optical recording

Sumio Hosaka, Hajime Koyanagi, Keizou Katoh, Fumio Isshiki, Tatsundo Suzuki, Mitsuhide Miyamoto, Yasushi Miyauchi, Akira Arimoto, and Testuya Nishida

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Abstract

Prototyped XY-stages driving electron beam (EB) writing system is developed to research the possibility to write fine patterns. High density optical recording pattern with 25Gbit/in2 is demonstrated. It is also clear that EB writing (drawing) system has a potential to achieve a required fine pattern for 100Gbit/in2.

© 2001 IEEE

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