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Conferences > CLEOPR > 2001 > WC1 > WC1_2
  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper WC1_2

Blue light-emitting diode fabrication of an InGaN/GaN epilayer bonded on a Si substrate by laser liftoff

C. C. Chen, M. C. Hsu, J. R. Hsiao, J. L. Yen, Y. J. Yang, C. H. Lin, L. A. Wang, and C. C. Liu

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Abstract

We report that a blue LED was successfully fabricated on a bounded InGaN/GaN/Si wafer, in which the InGaN/GaN epilayer was originally grown on a sapphire substrate then bonded and transferred to a Si substrate by laser liftoff technique.

© 2001 IEEE

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