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Sub-surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-infrared Femtosecond Laser Pulses

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Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.

© 2018 The Author(s)

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