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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CTuP40

Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses

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We present surface structures formed on silicon after irradiation by large numbers of low-fluence femtosecond laser pulses with wavelengths in the transparency regime of silicon. These structures have periods significantly less than the laser wavelength.

© 2004 Optical Society of America

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