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Increasing the Q-Factor-Product and Efficiency of Raman Silicon Nanocavity Lasers Fabricated by Photolithography

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Abstract

By optimizing a thermal treatment, the quality-factor-product and energy efficiency of a Raman silicon nanocavity laser fabricated by CMOS-compatible processes are improved by factors of 2.4 and 13, respectively, compared to the previously reported values.

© 2022 IEEE

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