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Conferences > CLEOPR > 2022 > CMP3B > CMP3B_04

Fast and Low-Cost Fabrication of Large-Area Terahertz Metasurface Devices Using Laser-Induced Graphene Technology

Zongyuan Wang and Bin Hu

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Abstract

Using a fabrication system with a focal spot ≤5 μm, the LIG-based terahertz metasurface with a size of 15 mm × 15 mm and a resolution of 30 μm can be fabricated in 34 seconds.

© 2022 IEEE

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