Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane

Dong J. Choi; Sangwoo Nam; Dong U. Kim; Young J. Park; Man J. Her; Min G. Lim; Myung S. Hong; Hyeju Song; Jaesok Yu; Jaesok Yu; Sangyoon Han; Sangyoon Han

doi:10.1364/CLEOPR.2022.CThA17D_02

Proceedings of the 2022 Conference on Lasers and Electro-Optics Pacific Rim
Technical Digest Series (Optica Publishing Group, 2022),
paper CThA17D_02
•https://doi.org/10.1364/CLEOPR.2022.CThA17D_02

Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane

Dong J. Choi, Sangwoo Nam, Dong U. Kim, Young J. Park, Man J. Her, Min G. Lim, Myung S. Hong, Hyeju Song, Jaesok Yu, and Sangyoon Han

Conference on Lasers and Electro-Optics/Pacific Rim 2022

Sapporo Japan
31 August–5 September 2022
ISBN:

From the session
Micro/Nano Optical Sensors (CThA17D)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
D. J. Choi, S. Nam, D. U. Kim, Y. J. Park, M. J. Her, M. G. Lim, M. S. Hong, H. Song, J. Yu, and S. Han, "Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane," in Proceedings of the 2022 Conference on Lasers and Electro-Optics Pacific Rim, Technical Digest Series (Optica Publishing Group, 2022), paper CThA17D_02.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

We report on an optical ultrasound sensor with a 70 nm-thick opto-mechanical membrane. The device is made of a single silicon layer. The sensitivity and fractional bandwidth of the sensor are 0.41 μV/Pa and 62%, respectively.

PDF Article

Previous Article Next Article