Abstract

Two-dimensional (2D) materials such as transition metal dichalcogenides (TMDCs) have recently emerged as an exciting class of quantum materials that can enable technological advancement in various fields, including electronics, optoelectronics, and photonics. Therefore, there is a significant demand for high-quality crystal growth and wafer-scale integration methods to transition their exciting properties from lab to fab. Here, I will discuss some of the laser-based synthesis techniques we have developed to control the growth of both single-crystalline 2D flakes and large-scale polycrystalline 2D films for wafer-scale electronics. I will report the synthesis of the highest-quality single-crystalline monolayers using the laser-assisted vapor phase growth method directly from stoichiometric powders. I will particularly highlight our condensed phase growth approach compatible with direct laser writing as well as the conventional lithography and device integration technologies. Patterned integration of 2D materials on both flexible and rigid substrates will be demonstrated. The crystal structures, quality, and device performance will also be discussed and compared with the common growth methods. These laser-based approaches provide unique synthesis and processing opportunities that are not easily accessible through conventional methods.

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