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Conferences > CLEOPR > 2022 > CTuP3D > CTuP3D_04

Profile control of silicon moth-eye structures for terahertz antireflection fabricated by femtosecond laser processing

Xi Yu, Yuki Yasunaga, Kazusa Goto, Dejun Liu, Makoto Kuwahara, and Shingo Ono

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Abstract

Micro tapers with different profiles were fabricated by using femtosecond laser processing, and these tapers were employed to constitute moth-eye structures for terahertz frequencies. The relationship between profiles and antireflective performance is quantitatively analyzed.

© 2022 IEEE

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