Abstract
Terahertz antireflective structures on Si substrates are fabricated by femtosecond laser processing. The structure is constituted by periodic grooves at micro order. Their antireflective characteristics are evaluated by THz-TDS (terahertz time-domain spectroscopy). The results show that the surface reflectance is almost decreased to 0 and antireflection band was widened by improving aspect ratio of grooves.
© 2018 The Author(s)
PDF ArticleMore Like This
Xi Yu, Yuki Yasunaga, Kazusa Goto, Dejun Liu, Makoto Kuwahara, and Shingo Ono
CTuP3D_04 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2022
Xi Yu, Kazusa Goto, Yuki Yasunaga, Junshi Soeda, Makoto Kuwahara, and Shingo Ono
CTuP3D_05 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2022
Haruyuki Sakurai, Natsuki Nemoto, Kuniaki Konishi, Yuki Sakurai, Nobuhiko Katayama, Tomotake Matsumura, Junji Yumoto, and Makoto Kuwata-Gonokami
JW2A.77 CLEO: Applications and Technology (CLEO:A&T) 2018