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Conferences > CLEOPR > 2022 > CTuP5B > CTuP5B_01

Processing the bulk of silicon using IR ultrashort laser pulses – from waveguides to welding

Stefan Nolte, Namig Alasgarzade, Alessandro Alberucci, Markus Blothe, Chandroth P. Jisha, Qingfeng Li, Gabor Matthäus, and Maxime Chambonneau

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Abstract

We report on processing the bulk of silicon with infrared ultrashort laser pulses. The localized energy deposition and resulting material modifications enable various applications, from the inscription of waveguides to dicing and semiconductor–metal welding.

© 2022 IEEE

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