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Conferences > CLEO_AT > 2015 > AM2K > AM2K.6

Elucidating the mechanism of nanocone and nanohole formation on Si by optical trap assisted nanopatterning

Ting-Hsuan Chen, Yu-Cheng Tsai, Romain Fardel, and Craig B. Arnold

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Abstract

Using optical trap-assisted nanopatterning (OTAN), we are able to control the formation of nanocones and nanoholes in Silicon. The effects are described by integrating FDTD and heat transfer modeling to account for the nanoscale features.

© 2015 Optical Society of America

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