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Conferences > CLEO_AT > 2022 > ATu5K > ATu5K.6

Dynamic Ellipsometry Measurement Based on a Simplified Independent Locking Dual-Comb System

Ruixue Zhang, Liheng Shi, Siyu Zhou, and Guanhao Wu

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Abstract

High-speed and dynamic ellipsometry spectroscopic measurement has been developed with an independent locking dual-comb system. The measurement precision and dynamic performance of the proposed system are demonstrated experimentally.

© 2022 The Author(s)

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