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Conferences > CLEO_SI > 2016 > SW1H > SW1H.5

Dual-Optical-Comb Spectroscopic Ellipsometry

Takeo Minamikawa, Yi-Da Hsieh, Kyuki Shibuya, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Takeshi Yasui, and Tetsuo Iwata

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Abstract

We proposed spectroscopic ellipsometry employing dual-optical-comb spectroscopy. We demonstrated the ellipsometric evaluation of a high-order quarter waveplate and a SiO2 thin film standard with the spectral resolution of 48 MHz.

© 2016 Optical Society of America

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