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Conferences > CLEO_AT > 2022 > AW1D > AW1D.3

Demonstration of 372 nm Micropillar Light Emitting Diodes Using Novel Ni/Au/Ni Dry Etch Mask and Ohmic Contact

Matthew Seitz, Matthew Hartensveld, Bryan Melanson, and Jing Zhang

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Abstract

Micropillar InGaN/AlGaN LEDs were fabricated using a novel Ni/Au/Ni etching mask. This Ni/Au/Ni structure effectively combines a good ohmic contact and etching mask into a single structure, allowing for demonstration of 372 nm micropillar LEDs.

© 2022 The Author(s)

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