Abstract

The performance of waveguide components realized using 800-nm thick Si₃N₄ photonic integrated platform is assessed for operation at 2.6–2.7 μm. Propagation losses as low as 0.67 dB/cm and bend losses of 0.017 dB for 50 μm radius of curvature were measured at 2.68 μm. Moreover, a shape-optimized 1x2 Y-branch with a low loss of 0.1 dB is demonstrated. Finally, a tunable ring resonator with a free-spectral range of 5.16 nm and a tuning factor of 13.25 nm/W is reported. These low-loss building blocks open an attractive perspective for the fabrication of high-performance hybrid-integrated laser required in sensing applications.

© 2022 The Author(s)