Opto-Thermocapillary Chemical Machining

Anand Swain; Pavana Siddhartha Kollipara; Yuebing Zheng; Yuebing Zheng

doi:10.1364/CLEO_AT.2023.AM4R.6

CLEO 2023
Technical Digest Series (Optica Publishing Group, 2023),
paper AM4R.6
•https://doi.org/10.1364/CLEO_AT.2023.AM4R.6

Opto-Thermocapillary Chemical Machining

Anand Swain, Pavana Siddhartha Kollipara, and Yuebing Zheng

CLEO: Applications and Technology 2023

San Jose, CA United States
7–12 May 2023
ISBN: 978-1-957171-25-8

From the session
High Precision Laser Micromachining and Analytics (AM4R)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
A. Swain, P. S. Kollipara, and Y. Zheng, "Opto-Thermocapillary Chemical Machining," in CLEO 2023, Technical Digest Series (Optica Publishing Group, 2023), paper AM4R.6.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

We report Opto-Thermocapillary Chemical Machining (OTCCM) for selective etching of light-absorbing thin films. A programmable laser beam inscribes site-selective patterns on demand on thin films at extremely low etchant concentrations and power

PDF Article

More Like This

Mid-Infrared Opto-nanofluidics for on-Chip Chemical Sensing

Pao Tai Lin, Sen Wai Kwok, Hao-Yu Greg Lin, Vivek Singh, Dawn T. H. Tan, Lionel C. Kimerling, George M. Whitesides, and Anu Agarwal
IM4A.2 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2014

Real-time data input in optical-processing devices using thermocapillary photographic films

G. Da Costa, F. Bentolila, and E. Rutz
TUB6 Conference on Lasers and Electro-Optics (CLEO:S&I) 1983

Machine Vision and Motion Control Applied to the Packaging of Opto-Electronic Devices

Deepak Sood, Mark Lowry, Shin-yee Lu, and Oliver T. Strand
IThE2 Integrated Photonics Research (IPR) 1995

Previous Article Next Article