Abstract

A number of optical correlation methods for the diagnostics of slightly rough surfaces have been developed. The problem is treated using the model of infinitely extended random phase objects. It is based on the following assumptions: (i) all spatial frequencies corresponding to the phase structure of the object contribute to formation of the radiation field resulting from interaction with the object; (ii) the dispersion of the object phase ${\text{σ}}_{\text{φ}0}^2$ < 1; (iii) the inhomogeneity correlation radius of the random phase object is larger than the wavelength, i.e., l_φ0 > 1.

© 1994 IEEE