Abstract

There has been a considerable amount of work performed over the last ten years on extending excimer laser gas lifetimes and improving laser performance by various means. One of the most successful has been cryogenic trapping of the detrimental contaminants of the excimer laser mixture. Significant improvements over current laser performance have been obtained using this method combined with a novel source of fluorine for use with fluoride-based lasers (ArF, KrF etc.).

© 1994 IEEE