Abstract

The use of photonic integrated circuits (PICs) for sensor applications is lucrative due to the ruggedness, compact size, volume manufacturability and high functionality of a monolithic sensor chip. Monolithically integrated optical sensors, being small and with reduced critical physical alignment requirements, may be employed in high-performance optical microsystems, compact multi-sensor arrays or micro-electromechanical systems (MEMS). In the following, we discuss two prototype monolithic sensor devices.

© 1996 IEEE