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Rare Earth Doped Al2O3-Thin Film Waveguides Deposited by MO-PECVD and MO-LPCVD on Silicon Substrates

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Abstract

Optical amplification with EDFAs has opened up new ways for high speed data communication. This stimulated research activities for planar rare earth doped waveguides. Complete active devices as loss-compensated 1:8 splitters can be developed on silicon substrates, when optical amplification is combined with integrated optical waveguide components, fiber alignment structures, and hybrid pump laser mounting.

© 1996 IEEE

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