Abstract

In this paper the influences on the dimension accuracy and the roughness of pulsed laser caved shapes in alumina ceramic have been studied. The experiments were performed on the experimental setup shown in figure 1. As a laser source pulsed LP-3000 Nd:YAG laser was used. A single lens, mounted on the z translation stage, with focusing length of 100 mm was used to focus the laser light onto the target surface which was mounted on the x-y computer controlled translation stages. The movement resolution was 10 μm. The samples used were Al₂O₃ ceramic plates. After treatment ceramic samples were examined by an optical microscope and the surface profile measurement were performed with a stylus apparatus.

© 1996 IEEE