Abstract

The development of diode pumped solid state lasers with high beam quality improves the quality of laser beam removed micro-structures and opens the possibility to use this technology as a new manufacturing method for producing micro-tools. Predestined materials for the 3-dimensional micro-structuring by laser beam removal are hard materials such as ceramics and hard metals, which can be processed only by time and cost expensive technologies. These tools can be used for forming processes of metal parts, like stamping, embossing or cutting.

© 1998 IEEE