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Conferences > CLEO_Europe > 1998 > CThH > CThH87

Characterization of laser plasma plume for deposition of CNX films

J. Lančok, M. Jelínek, J. Bulíř, and C. Grivas

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Abstract

Pulsed laser ablation of graphite in nitrogen atmosphere is one of the perspective technique for the preparation of CNX films and superhard β-C3N4 films. The study of ablation process is very important for optimalization of deposition conditions and CNX film properties.

© 1998 IEEE

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