Abstract

C₃N₄ was predicted to have a crystal structure of β-Si₃N₄, and a hardness superior to that of diamond, and hence become a target attracting scientists all over the world. In the present paper CN_X films were successfully prepared by DC magnetron sputtering of pure graphite target in pure nitrogen atmosphere. N/C ratio and the nature of the chemical binding of C-N atoms were analyzed by SEM, TEM, XPS spectroscopy, IR spectroscopy and MPM and was found to be strongly process related.

© 1995 Optical Society of America