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Deep Levels Induced by Impurity Free Vacancy Disordering

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Abstract

The use of quantum well intermixing (QWI) as a post growth process to modify the bandgap in optoelectronic integrated circuits is an attractive alternative to regrowth and over-growth processes. Impurity-free vacancy disordering (IFVD) offers the potential advantage of fewer extra expensive processing steps compared to intermixing achieved via implantation and annealing, in addition to low optical losses.

© 1998 IEEE

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