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Fabrication of test structures for 4x4 InP/InGaAsP Integrated Optical Matrix

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Abstract

All-optical space switches are increasingly important for high performance optical communication networks and systems. A wide range of optical switches have been studied in recent years, but they remain costly or provide limited functionality. We report the fabrication technologies developed for a previously designed novel compact 1.5 μm InP/InGaAsP 4x4 integrated optical switching matrix measuring 1x2 mm2 in size.

© 1998 IEEE

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