Abstract
Speckle-interferometry is a sophisticated technique for the non-contact, high precision measurement of form, deformation and vibration of technical surfaces. In the following, a new single frame phase-shifting speckle- interferometer for the quantitative measurement of out-of-plane-deformations is described /1/. Six interference patterns are acquired within the frame time of a single CCD-camera, thus minimizing the influence of thermal fluctuations and vibrations of the object.
© 1998 IEEE
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