Abstract

During the past years soft X-ray microscopy has proven to be a powerful tool for high resolution imaging of biological specimens. Up to now imaging X-ray microscopes have been based on synchrotron sources. This limits the accessibility of the technique to a few places in the world. In order to construct a laboratory-scale X-ray microscope the development of a table-top and inexpensive source is necessary. The fast growing field of X-ray lithography would also benefit from this type of compact source.

© 1998 IEEE