Abstract

In research of proposed superhard β-C₃N₄ layers [1] with pulsed laser deposition (PLD) technique a problem arise how to reach high nitrogen content in layers Using PLD only, N/C ratio usually does not excess value of 0 5-0 7 [2] In our new deposition arrangement (Fig 1), in which PLD is combined with additional radtofrequency (RF, 13 56 MHz, up to 300 W) and hollow cathode (HC) discharges for nitrogen excitation, the N/C round I was reached

© 2000 IEEE