Abstract

The advantages of femtosecond laser pulses for the precision drilling of holes in metals has been often demonstrated, e.g. in [1]. Precise edges without ablation debris can be reached. In most cases Ti:Sapphire lasers are used to produce holes with a diameter of some ten μm down to some μm. A UV-wavelength offers the possibility to improve the optical resolution by a factor of three compared to the Ti:Sapphire wavelength and to achieve even sub-μm holes with high aspect ratios.

© 2000 IEEE