Abstract

The generation of intense laser radiation in the vacuum and extreme ultraviolet spectral range is still a challenging problem. Starting from a titanium sapphire laser, conversion efficiencies up to 4 × 10⁻⁵ in the 15th harmonic (53 nm) have been demonstrated in the plateau region [1]. Compared to these high-order processes one can enter into this spectral range with low-order processes starting from KrF laser radiation. The conversion into the 3rd and 5th harmonic can yield a much higher efficiency.

© 2000 IEEE