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Conferences > CLEO_Europe > 2000 > CTuO > CTuO9
  • Conference on Lasers and Electro-Optics Europe
  • Technical Digest Series (Optica Publishing Group, 2000),
  • paper CTuO9

Intelligent 3-D Micro-Structuring with UV-Laser Systems

F. von Alvensleben, K. Körber, and C. Kulik

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Abstract

Flexible manufacturing techniques are necessary for the three-dimensional micro-structuring of prototypes, small batch sizes and tools for e.g. micro-embossing and molding. This paper shows the enormous potential of UV-lasers for the flexible and economical production of micro-components for a huge variety of materials. In addition, specially-developed machine technology is presented.

© 2000 IEEE

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