Abstract

In this work, experimental measurements of cleaning efficiency for three different metallic particulate contaminants (Au, 1 2±02 µm; Cu, 3±1 µm and W, 07±03 µm) on silicon are reported To study the dependence of cleaning efficiency on the type of contaminant, absorption of laser radiation by particles and substrate is considered The shadow effect of the metallic particles on the substrate imposes a bidimensional analysis of the temperature profile in the substrate

© 2000 IEEE