Abstract

There is considerable interest in the use of digital multimirror devices (DMDs) for laser-based machining, and recent work has demonstrated step-and-repeat ablation patterning with ~400nm writing resolution [1], with proposed applications in photonics and the medical sciences. DMD-based laser-machining can be a high resolution (sub-micron), rapid (1cm by 1cm per hour is predicted) and flexible technique that is proposed to offer an alternative approach to existing focussed ion beam and lithography-based fabrication, which while offering higher resolution are considerably slower.

© 2013 IEEE