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  • Conference on Lasers and Electro-Optics/Europe (CLEO/Europe 2023) and European Quantum Electronics Conference (EQEC 2023)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper cd_p_28

Heat-induced variation of second-harmonic generation in silicon oxynitride thin films

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Abstract

Studying interfaces in thin films is essential for optical coating due to possible defects, which can arise during deposition and can influence the optical and even mechanical properties of these films. At the same time, standard characterization methods lack the ability to study nanometer-thin interfaces buried below the surface. One of the methods to overcome this limitation is the method that uses SHG on thin films. Nevertheless, SHG from thin films depends on many factors, and in certain cases, it might not even be stable in time.

© 2023 IEEE

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