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Conferences > CLEO_QELS > 2022 > JTu4Q > JTu4Q.1

Electrothermal 1D Varifocal Metalens

Quentin A. A. Tanguy, Hussein Hussein, Shane Colburn, Luocheng Huang, Karl Böhringer, and Arka Majumdar

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Abstract

We report a MEMS-based spatial light modulator which consists of an electrothermally actuated varifocal metasurface. The focal length spans over 40 µm for less than 10 V and presents a high compactness and simplicity of fabrication.

© 2022 The Author(s)

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