Femtosecond Enhancement Cavity EUV Source with High Energy Resolution

Matthew H.C. Lam; Arthur K. Mills; Egor Chasovskikh; David J. Jones

doi:10.1364/CLEO_SI.2012.CF1C.1

Conference on Lasers and Electro-Optics 2012
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper CF1C.1
•https://doi.org/10.1364/CLEO_SI.2012.CF1C.1

Femtosecond Enhancement Cavity EUV Source with High Energy Resolution

Matthew H.C. Lam, Arthur K. Mills, Egor Chasovskikh, and David J. Jones

CLEO: Science and Innovations 2012

San Jose, California United States
6–11 May 2012
ISBN: 978-1-55752-943-5

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EUV Metrology (CF1C)

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M. H. C. Lam, A. K. Mills, E. Chasovskikh, and D. J. Jones, "Femtosecond Enhancement Cavity EUV Source with High Energy Resolution," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper CF1C.1.

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Abstract

A table-top EUV source based on a femtosecond enhancement cavity is seeded by a 1040-nm Yb-doped fiber amplifier system with 185-fs pulses and produces >10 microwatts/harmonic at 80 MHz out to 55 nm.

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