Low-loss and High Contrast Silicon-on-Insulator (SOI) Arrayed Waveguide Grating

S. T. S. Cheung; B. Guan; S. S. Djordjevic; K. Okamoto; S. J. B. Yoo

doi:10.1364/CLEO_SI.2012.CM4A.5

Conference on Lasers and Electro-Optics 2012
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper CM4A.5
•https://doi.org/10.1364/CLEO_SI.2012.CM4A.5

Low-loss and High Contrast Silicon-on-Insulator (SOI) Arrayed Waveguide Grating

S. T. S. Cheung, B. Guan, S. S. Djordjevic, K. Okamoto, and S. J. B. Yoo

CLEO: Science and Innovations 2012

San Jose, California United States
6–11 May 2012
ISBN: 978-1-55752-943-5

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Silicon Photonics I (CM4A)

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S. T. S. Cheung, B. Guan, S. S. Djordjevic, K. Okamoto, and S. J. B. Yoo, "Low-loss and High Contrast Silicon-on-Insulator (SOI) Arrayed Waveguide Grating," in Conference on Lasers and Electro-Optics 2012, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper CM4A.5.

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Abstract

We report high-extinction and low-loss 40-channel × 100-GHz arrayed waveguide grating (AWG) fabricated on silicon-on-insulator using high quality etching condition resulting in < 0.8 dB/cm loss and low phase errors.

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