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Silicon Nitride Ring Resonators Based on Subwavelength Grating Metamaterials

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Abstract

We demonstrate subwavelength grating metamaterial ring resonators on a silicon nitride platform. We report an internal Q factor of 2.11˖105 and 1.48 dB/cm propagation loss at 1540 nm wavelength. We discuss the potential of these novel devices for applications in evanescent field sensing and light amplification.

© 2022 The Author(s)

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