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Conferences > CLEO_SI > 2022 > SM4G > SM4G.7

Silicon Nitride Fabry-Perot Bragg Grating Nanoresonator with Ultrahigh Intrinsic Q

Yang Zhang, Jiahao Zhan, Sylvain Veilleux, and Mario Dagenais

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Abstract

An ultra-high intrinsic quality factor (Qint) of 13 million for a Fabry-Perot Bragg grating resonator is demonstrated. The loss of the Si3N4 waveguide platform is evaluated to be 0.018 dB/cm.

© 2022 The Author(s)

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