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Conferences > CLEO_SI > 2023 > SF2K > SF2K.6

Ultra-Efficient Foundry-Fabricated Resonant Modulators with Thermal Undercut

Anthony Rizzo, Venkatesh Deenadayalan, Matthew van Niekerk, Gerald Leake, Christopher Tison, Asher Novick, Daniel Coleman, Keren Bergman, Stefan Preble, and Michael Fanto

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Abstract

We demonstrate highly efficient vertical junction microdisk modulators with selective substrate undercut in a 300 mm CMOS foundry. The devices achieve record thermo-optic efficiency for sub-5 µm radius, enabling next-generation low-energy, highly-parallel DWDM links.

© 2023 The Author(s)

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